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Micromachined Mirrors (Hardcover, 2003 ed.)
Loot Price: R3,207
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Micromachined Mirrors (Hardcover, 2003 ed.)
Series: Microsystems, 12
Expected to ship within 12 - 17 working days
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Micromachined scanning mirrors are interesting for a wide variety
of applications because of their potential low cost, high speed,
low power consumption, and reliability. These mirrors can offer
significant advantages over macro-scale mirrors, but the
fundamental limitations of scanning mirrors have not been widely
discussed.
Miniaturization in electronic systems has led to radical
improvements in computers and communications, and micromachining
technologies promise to generate such improvements in miniaturized
mechanical and optical systems, including specifically
higher-speed, smaller, lower-cost scanning mirrors. Micromachined
Mirrors provides an overview of the performance enhancements that
will be realized by miniaturizing scanning mirrors like those used
for laser printers and barcode scanners, and the newly enabled
applications, including raster-scanning projection video displays
and compact, high-speed fiber-optic components.
There are a wide variety of methods used to fabricate micromachined
mirrors - each with its advantages and disadvantages. There are,
however, performance criteria common to mirrors made from any of
these fabrication processes. For example, optical resolution is
related to the mirror aperture, the mirror flatness, and the scan
angle. Micromachined Mirrors provides a framework for the design of
micromirrors, and derives equations showing the fundamental limits
for micromirror performance. These limits provide the micromirror
designer tools with which to determine the acceptable mirror
geometries, and to quickly and easily determine the range of
possible mirror optical resolution and scan speed.
Micromachined Mirrors presents descriptions ofmirrors made from two
fabrication processes - the surface-micromachining process and the
staggered torsional electrostatic combdrive (STEC) high-aspect
ratio micromachining process. The mirrors made using these two
processes are evaluated for scan speed, optical resolution, ease of
manufacture, and reliability.
Micromachined Mirrors also presents an example application of
surface-micromachined mirrors: a raster-scanning projection video
display. This demonstration shows the advantages of micromachined
mirrors (small high-speed scanners) with special attention paid to
the major drawback of surface-micromachined mirrors (lower
resolution due to dynamic deformation). The successful
demonstration of this simple prototype video display helps clarify
the importance of the critical performance characteristics to
consider when designing micromachined mirrors.
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