The book is designed to benefit students and engineers relating to
emerging field of RF-MEMS at graduate and post graduate level. It
presents a coherent, unified and comprehensive knowledge of the
fundamentals of RF-MEMS technology. The aim of the book is to
enable the student to get a simplified and satisfactory grasp of
the subject. It is written to make students realize that this
subject is relevant and useful and also encourage the engineers to
develop some facilities in its use. This promising and growing
field is of multidisciplinary nature and has diverse applications
in various areas like communication, and defense. This book gives
an overview of materials, micro fabrication, packaging, market and
forecast of RF-MEMS devices and reliability problems of RF-MEMS. It
indicates that RF-MEMS will revolutionize with advancement in this
technology as it is clearly a technological aspect.The concept is
made attractive by giving suitable representative case studies of
RF-MEMS, diagrams, and tables. The book will be most useful to not
only to students of Physics, Electronics Engineering but also to
researchers working in this emerging field.
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