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Books > Professional & Technical > Energy technology & engineering
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Handbook of Photomask Manufacturing Technology (Hardcover, New)
Loot Price: R7,374
Discovery Miles 73 740
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Handbook of Photomask Manufacturing Technology (Hardcover, New)
Expected to ship within 12 - 17 working days
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As the semiconductor industry attempts to increase the number of
functions that will fit into the smallest space on a chip, it
becomes increasingly important for new technologies to keep apace
with these demands. Photomask technology is one of the key areas to
achieving this goal. Although brief overviews of photomask
technology exist in the literature, the Handbook of Photomask
Manufacturing Technology is the first in-depth, comprehensive
treatment of existing and emerging photomask technologies
available. The Handbook of Photomask Manufacturing Technology
features contributions from 40 internationally prominent authors
from industry, academia, government, national labs, and consortia.
These authors discuss conventional masks and their supporting
technologies, as well as next-generation, non-optical technologies
such as extreme ultraviolet, electron projection, ion projection,
and x-ray lithography. The book begins with an overview of the
history of photomask development. It then demonstrates the steps
involved in designing, producing, testing, inspecting, and
repairing photomasks, following the sequences observed in actual
production. The text also includes sections on materials used as
well as modeling and simulation. Continued refinements in the
photomask-making process have ushered in the sub-wavelength era in
nanolithography. This invaluable handbook synthesizes these
refinements and provides the tools and possibilities necessary to
reach the next generation of microfabrication technologies.
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