Micro Electro-fabrication outlines three major nanoscale
electro-fabrication techniques, including electro-discharge
machining, electrochemical machining and electrochemical
deposition. Applications covered include the fabrication of nozzles
for automobiles, miniature hole machining for aerospace turbine
blade cooling, biomedical device fabrication, such as stents, the
fabrication of microchannels for microfluidic application, the
production of various MEMS devices, rapid prototyping of micro
components, and nanoelectrode fabrication for scanning electron
microscopy. This comprehensive book discusses the fundamental
nature of the various electro-fabrication processes as well as
mathematical modelling and applications. It is an important
reference for materials scientists and engineers working at the
nanoscale.
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