Books > Children's & Educational > Language & literature > English (including English as a school subject) > English language > English language readers
|
Buy Now
Nanoparticle Engineering for Chemical-Mechanical Planarization - Fabrication of Next-Generation Nanodevices (Paperback)
Loot Price: R1,798
Discovery Miles 17 980
|
|
Nanoparticle Engineering for Chemical-Mechanical Planarization - Fabrication of Next-Generation Nanodevices (Paperback)
Expected to ship within 12 - 17 working days
|
In the development of next-generation nanoscale devices, higher
speed and lower power operation is the name of the game. Increasing
reliance on mobile computers, mobile phone, and other electronic
devices demands a greater degree of speed and power. As chemical
mechanical planarization (CMP) progressively becomes perceived less
as black art and more as a cutting-edge technology, it is emerging
as the technology for achieving higher performance devices.
Nanoparticle Engineering for Chemical-Mechanical Planarization
explains the physicochemical properties of nanoparticles according
to each step in the CMP process, including dielectric CMP, shallow
trend isolation CMP, metal CMP, poly isolation CMP, and noble metal
CMP. The authors provide a detailed guide to nanoparticle
engineering of novel CMP slurry for next-generation nanoscale
devices below the 60nm design rule. They present design techniques
using polymeric additives to improve CMP performance. The final
chapter focuses on novel CMP slurry for the application to memory
devices beyond 50nm technology. Most books published on CMP focus
on the polishing process, equipment, and cleaning. Even though some
of these books may touch on CMP slurries, the methods they cover
are confined to conventional slurries and none cover them with the
detail required for the development of next-generation devices.
With its coverage of fundamental concepts and novel technologies,
this book delivers expert insight into CMP for all current and
next-generation systems.
General
Is the information for this product incomplete, wrong or inappropriate?
Let us know about it.
Does this product have an incorrect or missing image?
Send us a new image.
Is this product missing categories?
Add more categories.
Review This Product
No reviews yet - be the first to create one!
|
|
Email address subscribed successfully.
A activation email has been sent to you.
Please click the link in that email to activate your subscription.