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Surface Metrology for Micro- and Nanofabrication (Paperback) Loot Price: R4,222
Discovery Miles 42 220
Repayment Terms: R396 pm x 12*
You Save: R263 (6%)
Surface Metrology for Micro- and Nanofabrication (Paperback): Wei Gao

Surface Metrology for Micro- and Nanofabrication (Paperback)

Wei Gao

Series: Micro & Nano Technologies

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List price R4,485 Loot Price R4,222 Discovery Miles 42 220 | Repayment Terms: R396 pm x 12* You Save R263 (6%)

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Surface Metrology for Micro- and Nanofabrication presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components. This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers. In addition, the book outlines characterization and calibration techniques, as well as in-situ, on-machine, and in-process measurements for micro- and nanofabrication.

General

Imprint: Elsevier Science Publishing Co Inc
Country of origin: United States
Series: Micro & Nano Technologies
Release date: October 2020
First published: 2021
Authors: Wei Gao
Dimensions: 235 x 191mm (L x W)
Format: Paperback
Pages: 448
ISBN-13: 978-0-12-817850-8
Categories: Books > Professional & Technical > Mechanical engineering & materials > Materials science > General
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LSN: 0-12-817850-7
Barcode: 9780128178508

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