Surface Metrology for Micro- and Nanofabrication presents
state-of-the-art measurement technologies for surface metrology in
fabrication of micro- and nanodevices or components. This includes
the newest general-purpose scanning probe microscopes, and both
contact and non-contact surface profilers. In addition, the book
outlines characterization and calibration techniques, as well as
in-situ, on-machine, and in-process measurements for micro- and
nanofabrication.
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