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Study of AlN/GaN HEMTs (Paperback)
Loot Price: R1,685
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Study of AlN/GaN HEMTs (Paperback)
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The large polarization difference between AlN and GaN provides
extremely high electron densities at the heterointerface covered by
only 3-4 nm AlN barrier, which makes AlN/GaN heterojunction the
ultimate nitride structure for high-frequency applications. This
work includes the systematic study of the MBE growth of AlN/GaN
HEMTs, theoretical study of 2DEG scattering mechanisms, and device
issues of in-situ buffer leakage removal with polarization
engineering and decreasing contact resistance with band diagram
engineering. This book shows the approach to achieve the record
high 2DEG density (5e13/cm2) and the record-low sheet resistance
(128 ohm/sq) in high-quality AlN/GaN HEMTs. As a theoretical study,
electron scattering mechanisms are reviewed in this book. A novel
scattering mechanism, remote surface roughness scattering, is
proposed. Large buffer leakage and ohmic contact resistance are two
factors that heavily degrade high-speed device performance.
Polarization engineering was applied in the buffer leakage study,
which increased the ON/OFF ratio by >4 orders. Regrown Si-doped
GaN and graded InGaN/InN contacts have been demonstrated with a
comprehensive X-ray diffraction study.
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