Covering the complete design cycle of nanopositioning systems, this is the first comprehensive text on the topic. The book first introduces concepts associated with nanopositioning stages and outlines their application in such tasks as scanning probe microscopy, nanofabrication, data storage, cell surgery and precision optics. Piezoelectric transducers, employed ubiquitously in nanopositioning applications are then discussed in detail including practical considerations and constraints on transducer response. The reader is then given an overview of the types of nanopositioner before the text turns to the in-depth coverage of mechanical design including flexures, materials, manufacturing techniques, and electronics. This process is illustrated by the example of a high-speed serial-kinematic nanopositioner. Position sensors are then catalogued and described and the text then focuses on control. Several forms of control are treated: shunt control, feedback control, force feedback control and feedforward control (including an appreciation of iterative learning control). Performance issues are given importance as are problems limiting that performance such as hysteresis and noise which arise in the treatment of control and are then given chapter-length attention in their own right. The reader also learns about cost functions and other issues involved in command shaping, charge drives and electrical considerations. All concepts are demonstrated experimentally including by direct application to atomic force microscope imaging. Design, Modeling and Control of Nanopositioning Systems will be of interest to researchers in mechatronics generally and in control applied to atomic force microscopy and other nanopositioning applications. Microscope developers and mechanical designers of nanopositioning devices will find the text essential reading.

Covering the complete design cycle of nanopositioning systems, this is the first comprehensive text on the topic. The book first introduces concepts associated with nanopositioning stages and outlines their application in such tasks as scanning probe microscopy, nanofabrication, data storage, cell surgery and precision optics. Piezoelectric transducers, employed ubiquitously in nanopositioning applications are then discussed in detail including practical considerations and constraints on transducer response. The reader is then given an overview of the types of nanopositioner before the text turns to the in-depth coverage of mechanical design including flexures, materials, manufacturing techniques, and electronics. This process is illustrated by the example of a high-speed serial-kinematic nanopositioner. Position sensors are then catalogued and described and the text then focuses on control.

Several forms of control are treated: shunt control, feedback control, force feedback control and feedforward control (including an appreciation of iterative learning control). Performance issues are given importance as are problems limiting that performance such as hysteresis and noise which arise in the treatment of control and are then given chapter-length attention in their own right. The reader also learns about cost functions and other issues involved in command shaping, charge drives and electrical considerations. All concepts are demonstrated experimentally including by direct application to atomic force microscope imaging.

Design, Modeling and Control of Nanopositioning Systems will be of interest to researchers in mechatronics generally and in control applied to atomic force microscopy and other nanopositioning applications. Microscope developers and mechanical designers of nanopositioning devices will find the text essential reading.

This book presents recent developments in vibration control systems that employ embedded piezoelectric sensors and actuators, reviewing ways in which active vibration control systems can be designed for piezoelectric laminated structures, paying distinct attention to how such control systems can be implemented in real time. Includes numerous examples and experimental results obtained from laboratory-scale apparatus, with details of how similar setups can be built.

Flexible mechanical systems experience undesirable vibration in response to environmental and operational forces. The very existence of vibrations can limit the accuracy of sensitive instruments or cause significant errors in applications where high-precision positioning is essential so in many situations control of vibrations is a necessity.

Piezoelectric transducers have been used in countless applications as sensors, actuators, or both. When traditional passive vibration control techniques fail to meet requirements, piezoelectric transducers in conjunction with feedback controllers can be used effectively to suppress vibrations.

Piezoelectric Transducers for Vibration Control and Damping presents recent developments in vibration control systems that employ embedded piezoelectric sensors and actuators. In particular, it covers various ways in which active vibration control systems can be designed for piezoelectric laminated structures, paying distinct attention to how such control systems can be implemented in real time. The text contains numerous examples and experimental results obtained from laboratory-scale apparatus, with details of how similar setups can be built.

Features and topics:

• An overview of piezoelectricity.
• Modelling of flexible structures with embedded piezoelectric sensors and actuators.
• Feedback control of structural vibration using PPF and resonant controllers.
• A comprehensive treatment of piezoelectric shunt damping systems using systems-theoretic tools.
• A paradigm for designing active high-performance piezoelectric shunts.
• Innovative techniques to deal with the problem of hysteresis inpiezoelectric transducers.
• Instrumentation for piezoelectric sensors and actuators.
• Applications in atomic force and scanning tunneling microscopy.

An essential text and reference for graduates, researchers, and professionals working in mechanical engineering, aerospace engineering and mechatronics disciplines, this book will be a specially useful resource for scientists and engineers engaged in vibration control research.