As semiconductor manufacturers implement copper conductors in advanced interconnect schemes, research and development efforts shift toward the selection of an insulator that can take maximum advantage of the lower power and faster signal propagation allowed by copper interconnects. One of the main challenges to integrating a low-dielectric constant (low-kappa) insulator as a replacement for silicon dioxide is the behavior of such materials during the chemical-mechanical planarization (CMP) process used in Damascene patterning. Low-kappa dielectrics tend to be softer and less chemically reactive than silicon dioxide, providing significant challenges to successful removal and planarization of such materials.

The focus of this book is to merge the complex CMP models and mechanisms that have evolved in the past decade with recent experimental results with copper and low-kappa CMP to develop a comprehensive mechanism for low- and high-removal-rate processes. The result is a more in-depth look into the fundamental reaction kinetics that alter, selectively consume, and ultimately planarize a multi-material structure during Damascene patterning.

As semiconductor manufacturers implement copper conductors in advanced interconnect schemes, research and development efforts shift toward the selection of an insulator that can take maximum advantage of the lower power and faster signal propagation allowed by copper interconnects. One of the main challenges to integrating a low-dielectric constant (low-kappa) insulator as a replacement for silicon dioxide is the behavior of such materials during the chemical-mechanical planarization (CMP) process used in Damascene patterning. Low-kappa dielectrics tend to be softer and less chemically reactive than silicon dioxide, providing significant challenges to successful removal and planarization of such materials. The focus of this book is to merge the complex CMP models and mechanisms that have evolved in the past decade with recent experimental results with copper and low-kappa CMP to develop a comprehensive mechanism for low- and high-removal-rate processes. The result is a more in-depth look into the fundamental reaction kinetics that alter, selectively consume, and ultimately planarize a multi-material structure during Damascene patterning.

My name is Kiko. I'm a gardener. I grow happy. Let me show you how. Kiko shows the reader how she grows happiness: by making good choices, taking care of her body and mind, paying attention to her feelings, problem solving, and spending time with family and friends. Kids will learn that they can play a pivotal role in creating their own happiness, just like Kiko. A Note to Parents and Other Caregivers provides more strategies for helping children learn how to grow happiness. Age range 4-8.

Kiko grows and cultivates her garden, harvesting and sharing the fruits and veggies with her friends, neighbors, and family. This delightful tale serves as a metaphor of nurturing relationships and community, while sharing kindness with others. Grow Kind is a gentle narrative based on positive psychology and choice theory, essentially about cultivating kindness.

There are a world of ways to show love for our young! Animal parents shower their little ones with love in so many unique ways. Doves coo and dolphins whistle, while penguins huddle with their chicks for warmth and mountain goats shield their kids’ falls. Eye-catching collage illustrations and a lyrical text invite readers to explore animal behavior around the globe and celebrate the universal nature of a caregiver’s love.

Kiko goes on a camping trip with her class and learns about gratitude! Throughout the trip, Kiko discovers different things she appreciates about her family, friends, and opportunities. This story is based on the "theory of mind", which is the ability to take perspective of others and recognize that each person has their own thoughts, feelings, and perspectives. Growing gratitude leads to greater happiness and interpersonal relationships. A "Note to Parents and Caregivers" provides information on teaching children how to be grateful.