Describing non-equilibrium "cold" plasmas through a chemical physics approach, this book uses the state-to-state plasma kinetics, which considers each internal state as a new species with its own cross sections. Extended atomic and molecular master equations are coupled with Boltzmann and Monte Carlo methods to solve the electron energy distribution function. Selected examples in different applied fields, such as microelectronics, fusion, and aerospace, are presented and discussed including the self-consistent kinetics in RF parallel plate reactors, the optimization of negative ion sources and the expansion of high enthalpy flows through nozzles of different geometries.

The book will cover the main aspects of the state-to-state kinetic approach for the description of nonequilibrium cold plasmas, illustrating the more recent achievements in the development of kinetic models including the self-consistent coupling of master equations and Boltzmann equation for electron dynamics. To give a complete portrayal, the book will assess fundamental concepts and theoretical formulations, based on a unified methodological approach, and explore the insight in related scientific problems still opened for the research community.

Plasmas in Nature, Laboratory, and Technology (A. Ignatov, A.A. Rukhadze). Laser Diagnostics of Plasmas (L. Pyatnitsky). Probe Diagnostics of Plasmas (G. Dilecce). Theory, Properties, and Applications of Nonequilibrium Plasmas Created by External Energy Sources (E.E. Son). Nonequilibrium Plasma Modeling (M. Capitelli et al.). Gas Discharge Lamps (M. Koedam). Plasma Etching Processes and Diagnostics (R. d'Agostino, F. Fracassi). Plasma Deposition (A. Koch). Correlations between Active Plasma Species and Steel Surface Nitriding in Microwave Postdischarge Reactors (A. Ricard et al.). Simultaneous Removal of NOx SOx and Soot in Diesel Engine Exhaust by Plasma/Oil Dynamics Means (K. Fujii). DeNOx DeSOx Process by Gas Energization (L. Civitano, E. Sani). Microwave Excitation Technology (P. Leprince, J. Marec). Negative Ion Source Technology (H.J. Hopman, R.M.A. Heeren). Quasistationary Optical Discharges on Solid Targets (V.B. Fedorov). Index.

Describing non-equilibrium "cold" plasmas through a chemical physics approach, this book uses the state-to-state plasma kinetics, which considers each internal state as a new species with its own cross sections. Extended atomic and molecular master equations are coupled with Boltzmann and Monte Carlo methods to solve the electron energy distribution function. Selected examples in different applied fields, such as microelectronics, fusion, and aerospace, are presented and discussed including the self-consistent kinetics in RF parallel plate reactors, the optimization of negative ion sources and the expansion of high enthalpy flows through nozzles of different geometries. The book will cover the main aspects of the state-to-state kinetic approach for the description of nonequilibrium cold plasmas, illustrating the more recent achievements in the development of kinetic models including the self-consistent coupling of master equations and Boltzmann equation for electron dynamics. To give a complete portrayal, the book will assess fundamental concepts and theoretical formulations, based on a unified methodological approach, and explore the insight in related scientific problems still opened for the research community.