Describing non-equilibrium "cold" plasmas through a chemical
physics approach, this book uses the state-to-state plasma
kinetics, which considers each internal state as a new species with
its own cross sections. Extended atomic and molecular master
equations are coupled with Boltzmann and Monte Carlo methods to
solve the electron energy distribution function. Selected examples
in different applied fields, such as microelectronics, fusion, and
aerospace, are presented and discussed including the
self-consistent kinetics in RF parallel plate reactors, the
optimization of negative ion sources and the expansion of high
enthalpy flows through nozzles of different geometries.
The book will cover the main aspects of the state-to-state
kinetic approach for the description of nonequilibrium cold
plasmas, illustrating the more recent achievements in the
development of kinetic models including the self-consistent
coupling of master equations and Boltzmann equation for electron
dynamics. To give a complete portrayal, the book will assess
fundamental concepts and theoretical formulations, based on a
unified methodological approach, and explore the insight in related
scientific problems still opened for the research community.
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