Where conventional testing and inspection techniques fail at the micro-scale, optical techniques provide a fast, robust, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands. Optical Inspection of Microsystems is the first comprehensive, up-to-date survey of the most important and widely used full-field optical metrology and inspection technologies. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moire techniques, interference microscopy, laser Doppler vibrometry, holography, speckle metrology, and spectroscopy. They also examine modern approaches to data acquisition and processing. The book emphasizes the evaluation of various properties to increase reliability and promote a consistent approach to optical testing. Numerous practical examples and illustrations reinforce the concepts. Supplying advanced tools for microsystem manufacturing and characterization, Optical Inspection of Microsystems enables you to reach toward a higher level of quality and reliability in modern micro-scale applications.

Advancement of Optical Methods & Digital Image Correlation in Experimental Mechanics, Volume 4 of the Proceedings of the 2020 SEM Annual Conference & Exposition on Experimental and Applied Mechanics, the fourth volume of seven from the Conference, brings together contributions to this important area of research and engineering. The collection presents early findings and case studies on a wide range of optical methods ranging from traditional photoelasticity and interferometry to more recent DIC and DVC techniques, and includes papers in the following general technical research areas: DIC Methods & Its Applications Photoelsticity and Interferometry ApplicationsMicro-Optics and Microscopic SystemsMultiscale

MEMS and Nanotechnology, Volume 5: Proceedings of the 2013 Annual Conference on Experimental and Applied Mechanics, the fifth volume of eight from the Conference, brings together contributions to this important area of research and engineering. The collection presents early findings and case studies on a wide range of areas, including: Microelectronics Packaging Single Atom/Molecule Mechanical Testing MEMS Devices & Fabrication In-Situ Mechanical Testing Nanoindentation Experimental Analysis of Low-Dimensional Materials for Nanotechnology

Experimental and Applied Mechanics, Volume 4: Proceedings of the 2012 Annual Conference on Experimental and Applied Mechanics, the fourth volume of seven from the Conference, brings together 54 contributions to this important area of research and engineering. The collection presents early findings and case studies on fundamental and applied aspects of Experimental and Applied Mechanics, including papers on: Fracture & Fatigue Microscale & Microstructural Effects in Fatigue & Fracture Material Applications Composite Characterization Using Digital Image Correlation Techniques Multi-Scale Simulation and Testing of Composites Residual Stress Inverse Problems/Hybrid Methods Nano-Composites Microstructure Material Characterization Modeling and Uncertainty Quantification Impact Behavior of Composites

Imaging Methods for Novel Materials and Challenging Applications, Volume 3: Proceedings of the 2012 Annual Conference on Experimental and Applied Mechanics, the third volume of seven from the Conference, brings together 62 contributions to this important area of research and engineering. The collection presents early findings and case studies on fundamental and applied aspects of Experimental and Applied Mechanics, including papers on: Role of optical interferometry in advancement of material characterization Three-dimensional imaging and volumetric correlation Digital holography and experimental mechanics Digital image correlation Metrology and displacement measurement at different scales Optical methods for dynamic tests Optical methods for and with MEMS and NEMS Thermomechanics and infrared imaging Imaging methods applied to biomaterials and soft materials Applied photoelasticity Optical measurement systems using polarized light Hybrid imaging techniques Contouring of surfaces Novel optical techniques

This book contains papers of the 5th International Symposium on Experimental Mechanics (5-ISEM) and the 9th Symposium on Optics in Industry (9-SOI), whose general theme is Emerging Challenges for Experimental Mechanics in Energy and Environmental Applications. These symposia are organized by Centro de Investigaciones en Optica (CIO) and Mexican Academy for Optics (AMO), under the sponsorship of the Society of Experimental Mechanics (SEM) and other national and international Organizations; Symposia are interdisciplinary forums for engineers, technicians, researchers and managers involved in all fields of Optics, Opto-mechatronics, Mechanics and Mechanical Engineering. * Addresses a broad readership including graduate and postgraduate students, researchers, and engineers working in experimental mechanics and in the application of optical methods * Covers a broad spectrum of topics highlighting the use of optical methods in experimental mechanics, energy, and in the environment

Advancement of Optical Methods & Digital Image Correlation in Experimental Mechanics, Volume 3 of the Proceedings of the 2019 SEM Annual Conference & Exposition on Experimental and Applied Mechanics, the third volume of six from the Conference, brings together contributions to this important area of research and engineering. The collection presents early findings and case studies on a wide range of optical methods ranging from traditional photoelasticity and interferometry to more recent DIC and DVC techniques, and includes papers in the following general technical research areas: DIC Methods & Its Applications Photoelsticity and Interferometry ApplicationsMicro-Optics and Microscopic SystemsMultiscale and New Developments in Optical MethodsDIC and its Applications for Inverse Problems

Advancement of Optical Methods & Digital Image Correlation in Experimental Mechanics, Volume 3 of the Proceedings of the 2018 SEM Annual Conference & Exposition on Experimental and Applied Mechanics, the third volume of eight from the Conference, brings together contributions to this important area of research and engineering. The collection presents early findings and case studies on a wide range of optical methods ranging from traditional photoelasticity and interferometry to more recent DIC and DVC techniques, and includes papers in the following general technical research areas: New Developments in Optical Methods & Fringe Pattern Analysis; DIC Applications for Challenging Environments; Optical Methods in SEM: History & Perspective; Mechanical Characterization of Materials & Structures with Optical Methods; Bioengineering.