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High Power Impulse Magnetron Sputtering: Fundamentals,
Technologies, Challenges and Applications is an in-depth
introduction to HiPIMS that emphasizes how this novel sputtering
technique differs from conventional magnetron processes in terms of
both discharge physics and the resulting thin film characteristics.
Ionization of sputtered atoms is discussed in detail for various
target materials. In addition, the role of self-sputtering,
secondary electron emission and the importance of controlling the
process gas dynamics, both inert and reactive gases, are examined
in detail with an aim to generate stable HiPIMS processes. Lastly,
the book also looks at how to characterize the HiPIMS discharge,
including essential diagnostic equipment. Experimental results and
simulations based on industrially relevant material systems are
used to illustrate mechanisms controlling nucleation kinetics,
column formation and microstructure evolution.
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