"New Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices" introduces the reader to transmission and scanning microscope image processing for metal and non-metallic microstructures.

Engineers and scientists face the pressing problem in ULSI development and quality assurance: microscopy methods can t keep pace with the continuous shrinking of feature size in microelectronics. Nanometer scale sizes are below the resolution of light, and imaging these features is nearly impossible even with electron microscopes, due to image noise.

This book presents novel "smart" image processing methods, applications, and case studies concerning quality improvement of microscope images of microelectronic chips and process optimization. It explains an approach for high-resolution imaging of advanced metallization for micro- and nanoelectronics. This approach obviates the time-consuming preparation and selection of microscope measurement and sample conditions, enabling not only better electron-microscopic resolution, but also more efficient testing and quality control. This in turn leads to productivity gains in design and development of nano-scale ULSI chips.

The authors also present several approaches for super-resolving low-resolution images to improve failure analysis of microelectronic chips.
Acquaints users with new software-based approaches to enhance high-resolution microscope imaging of microchip structuresDemonstrates how these methods lead to productivity gains in the development of ULSI chipsPresents several techniques for the superresolution of images, enabling engineers and scientists to improve their results in failure analysis of microelectronic chips"

This book, Modular optical systems for nonlinear data processing and manipulation, presents the PhD thesis under the same name, submitted in 2003. The work combines knowledge in image processing, switching in communication networks and knowledge in modern optics, especially in the field of Diffractive Optical Elements (D.O.E). The main topics covered in this book are: Multi stage binary phase-only image processing, Optical multi stage interconnection network (MIN) optimization, Optical implementation of non-linear operators such as the Volterra operators, and Optical implementation of Fuzzy logic controllers. This book covers a variety of fields relevant for electrical engineers interested in exploring the wonderful world of optics from the system designer point of view and offer a window to some of the most fascinating applications of optical systems.