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Semiconductors lie at the heart of some of the most important
industries and technologies of the twentieth century. The
complexity of silicon integrated circuits is increasing
considerably because of the continuous dimensional shrinkage to
improve efficiency and functionality. This evolution in design
rules poses real challenges for the materials scientists and
processing engineers. Materials, defects and processing now have to
be understood in their totality. World experts discuss, in this
volume, the crucial issues facing lithography, ion implication and
plasma processing, metallization and insulating layer quality, and
crystal growth. Particular emphasis is placed upon silicon, but
compound semiconductors and photonic materials are also
highlighted. The fundamental concepts of phase stability,
interfaces and defects play a key role in understanding these
crucial issues. These concepts are reviewed in a crucial fashion.
Semiconductors lie at the heart of some of the most important
industries and technologies of the twentieth century. The
complexity of silicon integrated circuits is increasing
considerably because of the continuous dimensional shrinkage to
improve efficiency and functionality. This evolution in design
rules poses real challenges for the materials scientists and
processing engineers. Materials, defects and processing now have to
be understood in their totality. World experts discuss, in this
volume, the crucial issues facing lithography, ion implication and
plasma processing, metallization and insulating layer quality, and
crystal growth. Particular emphasis is placed upon silicon, but
compound semiconductors and photonic materials are also
highlighted. The fundamental concepts of phase stability,
interfaces and defects play a key role in understanding these
crucial issues. These concepts are reviewed in a crucial fashion.
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