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The Physical Electronics Department of SRI International (formerly
Stanford Research Institute) has been pioneering the development of
devices fabricated to submicron tolerances for well over 20 years.
In 1961, a landmark paper on electron-beam lithography and its
associated technologies was published by K. R. Shoulderst (then at
SRI), which set the stage for our subsequent efforts in this field.
He had the foresight to believe that the building of such small
devices was actually within the range of human capabilities. As a
result of this initial momentum, our experience in the technologies
associated with microfabrication has become remarkably
comprehensive, despite the relatively small size of our research
activity. We have frequently been asked to deliver seminars or
provide reviews on various aspects of micro fabrication. These
activities made us aware of the need for a comprehensive overview
of the physics of microfabrication. We hope that this book will
fill that need."
In this revised and expanded edition, the authors provide a
comprehensive overview of the tools, technologies, and physical
models needed to understand, build, and analyze microdevices.
Students, specialists within the field, and researchers in related
fields will appreciate their unified presentation and extensive
references.
The Physical Electronics Department of SRI International (formerly
Stanford Research Institute) has been pioneering the development of
devices fabricated to submicron tolerances for well over 20 years.
In 1961, a landmark paper on electron-beam lithography and its
associated technologies was published by K. R. Shoulderst (then at
SRI), which set the stage for our subsequent efforts in this field.
He had the foresight to believe that the building of such small
devices was actually within the range of human capabilities. As a
result of this initial momentum, our experience in the technologies
associated with microfabrication has become remarkably
comprehensive, despite the relatively small size of our research
activity. We have frequently been asked to deliver seminars or
provide reviews on various aspects of micro fabrication. These
activities made us aware of the need for a comprehensive overview
of the physics of microfabrication. We hope that this book will
fill that need."
In this revised and expanded edition, the authors provide a
comprehensive overview of the tools, technologies, and physical
models needed to understand, build, and analyze microdevices.
Students, specialists within the field, and researchers in related
fields will appreciate their unified presentation and extensive
references.
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