The Physics of Microfabrication (Paperback, Softcover reprint of the original 1st ed. 1982)

The Physical Electronics Department of SRI International (formerly Stanford Research Institute) has been pioneering the development of devices fabricated to submicron tolerances for well over 20 years. In 1961, a landmark paper on electron-beam lithography and its associated technologies was published by K. R. Shoulderst (then at SRI), which set the stage for our subsequent efforts in this field. He had the foresight to believe that the building of such small devices was actually within the range of human capabilities. As a result of this initial momentum, our experience in the technologies associated with microfabrication has become remarkably comprehensive, despite the relatively small size of our research activity. We have frequently been asked to deliver seminars or provide reviews on various aspects of micro fabrication. These activities made us aware of the need for a comprehensive overview of the physics of microfabrication. We hope that this book will fill that need."

General

Imprint:	Springer-Verlag New York
Country of origin:	United States
Release date:	June 2013
First published:	1982
Authors:	Ivor Brodie • Julius J. Muray
Dimensions:	235 x 155 x 26mm (L x W x T)
Format:	Paperback
Pages:	504
Edition:	Softcover reprint of the original 1st ed. 1982
ISBN-13:	978-1-4899-2162-8
Categories:	Books > Professional & Technical > Energy technology & engineering > Electrical engineering > General Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > Electronic devices & materials > General
LSN:	1-4899-2162-1
Barcode:	9781489921628

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