The Seventh International Symposium on Gaseous Dielectrics was held in Knoxville, Tennessee, U. S. A. , on April 24-28, 1994. The symposium continued the interdisciplinary character and comprehensive approach of the preceding six symposia. Gaseous DielecIries VII is a detailed record of the symposium proceedings. It covers recent advances and developments in a wide range of basic, applied and industrial areas of gaseous dielectrics. It is hoped that Gaseous DielecIries VII will aid future research and development in, and encourage wider industrial use of, gaseous dielectrics. The Organizing Committee of the Seventh International Symposium on Gaseous Dielectrics consisted of G. Addis (U. S. A. ), L. G. Christophorou (U. S. A. ), F. Y. Chu (Canada), A. H. Cookson (U. S. A. ), O. Farish (U. K. ), I. Gallimberti (Italy) , A. Garscadden (U. S. A. ), D. R. James (U. S. A. ), E. Marode (France), T. Nitta (Japan), W. Pfeiffer (Germany), Y. Qiu (China), I. Sauers (U. S. A. ), R. J. Van Brunt (U. S. A. ), and W. Zaengl (Switzerland). The local arrangements committee consisted of members of the Health Sciences Research Division and personnel of the Conference Office of the Oak Ridge National Laboratory, and staff of the University of Tennessee (UTK). The contributions of each member of these committees, the work of the Session Chairmen, the interest of the participants, and the advice of innumerable colleagues are gratefully acknowledged. I am especially indebted to Dr. Isidor Sauers, Dr. David R. James, Mrs.

Gaseous Dielectrics VIII covers recent advances and developments in a wide range of basic, applied, and industrial areas of gaseous dielectrics.

This volume deals with the basic knowledge and understanding of fundamental interactions of low energy electrons with molecules. It pro vides an up-to-date and comprehensive account of the fundamental in teractions of low-energy electrons with molecules of current interest in modern technology, especially the semiconductor industry. The primary electron-molecule interaction processes of elastic and in elastic electron scattering, electron-impact ionization, electron-impact dissociation, and electron attachment are discussed, and state-of-the art authoritative data on the cross sections of these processes as well as on rate and transport coefficients are provided. This fundamental knowledge has been obtained by us over the last eight years through a critical review and comprehensive assessment of "all" available data on low-energy electron collisions with plasma processing gases which we conducted at the National Institute of Standards and Technology (NIST). Data from this work were originally published in the Journal of Physical and Chemical Reference Data, and have been updated and expanded here. The fundamental electron-molecule interaction processes are discussed in Chapter 1. The cross sections and rate coefficients most often used to describe these interactions are defined in Chapter 2, where some recent advances in the methods employed for their measurement or calculation are outlined. The methodology we adopted for the critical evaluation, synthesis, and assessment of the existing data is described in Chapter 3. The critically assessed data and recommended or suggested cross sections and rate and transport coefficients for ten plasma etching gases are presented and discussed in Chapters 4, 5, and 6."

Gaseous Dielectrics IX covers recent advances and developments in a wide range of basic, applied, and industrial areas of gaseous dielectrics.

Emerging Dynamics: Science, Energy, Society and Values focuses on the impact of science, science-based technology and scientific values on present-day humanity and its future. The book advocates for a science willing to accommodate both human values and scientific facts. The four main subjects focused on throughout the text are: The overwhelming impact of modern science and science-based technology on virtually every aspect of human life Human values and their significance for science and society The need for mutual accommodation between scientific values and the traditional values of society The fundamental role of energy for civilization and society. The book cuts across scientific disciplines and looks at modern civilization through the knowledge provided by the physical, chemical, biomedical and other branches of natural science. The book is unique in its holistic approach, combining knowledge acquired by deduction, reduction-induction, and experimental scientific methods with knowledge acquired through history, philosophy, the arts, faith and cultural traditions. Modern civilization's most distinct characteristics are due to science, science-based technology and energy. The role of energy in the sustainability of civilization and the impact of biomedical science on man are especially emphasized throughout this timely book, making a case for a hopeful future based on both science and values. A science guided in its applications by human values and a value system cognizant of the facts of science and willing to accommodate them

Gaseous Dielectrics IX covers recent advances and developments in a wide range of basic, applied, and industrial areas of gaseous dielectrics.

The Sixth International Symposium on Gaseous Dielectrics was held in Knoxville, Tennessee, U.S.A., on September 23-27, 1990. The symposium continued the trans disciplinary character and comprehensive approach of the preceding five symposia. Gaseous Dielectrics VI is a detailed record of the symposium proceedings. It covers recent advances and developments in a wide range of basic, applied and industrial areas of gaseous dielectrics. It is hoped that Gaseous Dielectrics VI will aid future research and development in and encourage wider industrial use of gaseous dielectrics. The Organizing Committee of the Sixth International Symposium on Gaseous Dielectrics consisted of L. G. Christophorou (U.S.A.), F. Y. Chu (Canada), A. H. Cookson (U.S.A.), D. L. Damsky (U.S.A.), O. Farish (U.K.), I. Gallimberti (Italy), A. Garscadden (U.S.A.), E. Marode (France), T. Nitta (Japan), W. Pfeiffer (Germany), I. Sauers (U.S.A.), R. J. Van Brunt (U.S.A.), and W. Zaengl (Switzerland). The local arrangements committee consisted of members of the Health and Safety Research Division and personnel of the Conference Office of the Oak Ridge National Laboratory, and staff of the University of Tennessee (UTK). The contributions of each member of these committees, the work of the Session Chairmen, the interest of the participants, and the advice of innumerable colleagues are gratefully acknowledged.

This volume deals with the basic knowledge and understanding of fundamental interactions of low energy electrons with molecules. It pro vides an up-to-date and comprehensive account of the fundamental in teractions of low-energy electrons with molecules of current interest in modern technology, especially the semiconductor industry. The primary electron-molecule interaction processes of elastic and in elastic electron scattering, electron-impact ionization, electron-impact dissociation, and electron attachment are discussed, and state-of-the art authoritative data on the cross sections of these processes as well as on rate and transport coefficients are provided. This fundamental knowledge has been obtained by us over the last eight years through a critical review and comprehensive assessment of "all" available data on low-energy electron collisions with plasma processing gases which we conducted at the National Institute of Standards and Technology (NIST). Data from this work were originally published in the Journal of Physical and Chemical Reference Data, and have been updated and expanded here. The fundamental electron-molecule interaction processes are discussed in Chapter 1. The cross sections and rate coefficients most often used to describe these interactions are defined in Chapter 2, where some recent advances in the methods employed for their measurement or calculation are outlined. The methodology we adopted for the critical evaluation, synthesis, and assessment of the existing data is described in Chapter 3. The critically assessed data and recommended or suggested cross sections and rate and transport coefficients for ten plasma etching gases are presented and discussed in Chapters 4, 5, and 6."

Gaseous Dielectrics VIII covers recent advances and developments in a wide range of basic, applied, and industrial areas of gaseous dielectrics.

The Seventh International Symposium on Gaseous Dielectrics was held in Knoxville, Tennessee, U. S. A. , on April 24-28, 1994. The symposium continued the interdisciplinary character and comprehensive approach of the preceding six symposia. Gaseous DielecIries VII is a detailed record of the symposium proceedings. It covers recent advances and developments in a wide range of basic, applied and industrial areas of gaseous dielectrics. It is hoped that Gaseous DielecIries VII will aid future research and development in, and encourage wider industrial use of, gaseous dielectrics. The Organizing Committee of the Seventh International Symposium on Gaseous Dielectrics consisted of G. Addis (U. S. A. ), L. G. Christophorou (U. S. A. ), F. Y. Chu (Canada), A. H. Cookson (U. S. A. ), O. Farish (U. K. ), I. Gallimberti (Italy) , A. Garscadden (U. S. A. ), D. R. James (U. S. A. ), E. Marode (France), T. Nitta (Japan), W. Pfeiffer (Germany), Y. Qiu (China), I. Sauers (U. S. A. ), R. J. Van Brunt (U. S. A. ), and W. Zaengl (Switzerland). The local arrangements committee consisted of members of the Health Sciences Research Division and personnel of the Conference Office of the Oak Ridge National Laboratory, and staff of the University of Tennessee (UTK). The contributions of each member of these committees, the work of the Session Chairmen, the interest of the participants, and the advice of innumerable colleagues are gratefully acknowledged. I am especially indebted to Dr. Isidor Sauers, Dr. David R. James, Mrs.

The Advanced Study Institute (ASI) on "Linking the Gaseous and Condensed Phases of Matter: The Behavior of Slow Electrons" was held at Patras, Greece, September 5-18, 1993. The organizers of the Patras ASI felt that the study of the electronic properties of matter in various states of aggregation has advanced to a point where further progress required the interfacing of the phases of matter in order to find out and to understand how the microscopic and macroscopic properties of materials and processes change as we go from low pressure gas to the condensed phase. This approach is of foremost significance both from the point of view of basic research and of applications. Linking the electronic properties of the gaseous and condensed phases of matter is a fascinating new frontier of science embracing scientists not only from physics and chemistry but also from the life sciences and engineering. The Patras ASI brought together some of the world's foremost experts who work in the field of electronic properties of molecular gases, clusters, liquids, and solids. The thirty five lectures given at the meeting as well as the twenty nine poster papers presented and the formal and informal discussions that took place focused largely on the behavior of slow electrons in matter.

This is an engrossing book. It is also an unusual book: it is written by a scientist who is quite willing to talk about the softer side of life, about things such as love and respect and responsibility, and to try and position them in the context of his science. He is also willing to talk about religion, the manner in which it relates to science and science to it, and to attempt reconciliation of both. He sets himself a tough task, to tread the narrow path between the maudlin and the severely sober. In this, he is eminently successful. He is successful not because he aims at any grand synthesis, but because he has chosen the more modest path of simply laying out the cards on the table. This work is also unusual for another reason. The majority of books that attempt to explain science to a lay public, that try to describe its workings, its raison d'etre, its hidden contents, its societal impact, its implications for our future, etc., are written by theorists. This is hardly surprising. The theoretician, after all, is expected to think deeply, to be the great unifier, to be concernedwith meaning. Very few books about science are written by scientists, ones who spend their time in a working experimental laboratory. This is such a book. And because it is, it is also a very different book."