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Plasma Etching - Fundamentals and Applications (Hardcover): M. Sugawara Plasma Etching - Fundamentals and Applications (Hardcover)
M. Sugawara
R6,309 Discovery Miles 63 090
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The focus of this book is the remarkable advances in understanding of low pressure RF (radio frequency) glow discharges. A basic analytical theory and plasma physics are explained. Plasma diagnostics are also covered before the practicalities of etcher use are explored.

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