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Books > Science & Mathematics > Physics > States of matter > Plasma physics

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Plasma Etching - Fundamentals and Applications (Hardcover) Loot Price: R6,583

Discovery Miles 65 830

Repayment Terms: R617 pm x 12*

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Plasma Etching - Fundamentals and Applications (Hardcover): M. Sugawara

Plasma Etching - Fundamentals and Applications (Hardcover)

M. Sugawara

Series: Series on Semiconductor Science and Technology, 7

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Loot Price R6,583 Discovery Miles 65 830 | Repayment Terms: R617 pm x 12*

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The focus of this book is the remarkable advances in understanding of low pressure RF (radio frequency) glow discharges. A basic analytical theory and plasma physics are explained. Plasma diagnostics are also covered before the practicalities of etcher use are explored.

General

Imprint:	Oxford UniversityPress
Country of origin:	United Kingdom
Series:	Series on Semiconductor Science and Technology, 7
Release date:	2001
First published:	May 1998
Authors:	M. Sugawara (Professor)
Dimensions:	242 x 163 x 23mm (L x W x T)
Format:	Hardcover
Pages:	356
ISBN-13:	978-0-19-856287-0
Categories:	Books > Science & Mathematics > Physics > States of matter > Plasma physics Books > Science & Mathematics > Physics > Applied physics & special topics > General Books > Professional & Technical > Energy technology & engineering > Electrical engineering > General Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > General Promotions
LSN:	0-19-856287-X
Barcode:	9780198562870