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Micro/nano-mechanical systems are a crucial part of the modern
world providing a plethora of sensing and actuation functionalities
used in everything from the largest cargo ships to the smallest
hand-held electronics; from the most advanced scientific and
medical equipment to the simplest household items. Over the past
few decades, the processes used to produce these devices have
improved, supporting dramatic reductions in size, but there are
fundamental limits to this trend that require a new production
paradigm. The 2004 discovery of graphene ushered in a new era of
condensed matter physics research, that of two-dimensional
materials. Being only a few atomic layers thick, this new class of
materials exhibit unprecedented mechanical strength and flexibility
and can couple to electric, magnetic and optical signals.
Additionally, they can be combined to form van der Waals
heterostructures in an almost limitless number of ways. They are
thus ideal candidates to reduce the size and extend the
capabilities of traditional micro/nano-mechanical systems and are
poised to redefine the technological sphere. This thesis attempts
to develop the framework and protocols required to produce and
characterise micro/nano-mechanical devices made from
two-dimensional materials. Graphene and its insulating analogue,
hexagonal boron nitride, are the most widely studied materials and
their heterostructures are used as the test-bed for potential
device architectures and capabilities. Interlayer friction,
electro-mechanical actuation and surface reconstruction are some of
the key phenomena investigated in this work.
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