The main aim of this book is to give an overview of MEMS mechanical transducers. The text focuses mainly on examples of commercial and research devices; however, attention is also given to manufacturing techniques and materials, as well as the basic principles behind the operation of these devices.

MEMS for automotive and aerospace applications reviews the use of Micro-Electro-Mechanical-Systems (MEMS) in developing solutions to the unique challenges presented by the automotive and aerospace industries.
Part one explores MEMS for a variety of automotive applications. The role of MEMS in passenger safety and comfort, sensors for automotive vehicle stability control applications and automotive tire pressure monitoring systems are considered, along with pressure and flow sensors for engine management, and RF MEMS for automotive radar sensors. Part two then goes on to explore MEMS for aerospace applications, including devices for active drag reduction in aerospace applications, inertial navigation and structural health monitoring systems, and thrusters for nano- and pico-satellites. A selection of case studies are used to explore MEMS for harsh environment sensors in aerospace applications, before the book concludes by considering the use of MEMS in space exploration and exploitation.
With its distinguished editors and international team of expert contributors, MEMS for automotive and aerospace applications is a key tool for MEMS manufacturers and all scientists, engineers and academics working on MEMS and intelligent systems for transportation.
Chapters consider the role of MEMS in a number of automotive applications, including passenger safety and comfort, vehicle stability and controlMEMS for aerospace applications are also discussed, including active drag reduction, inertial navigation and structural health monitoring systemsPresents a number of case studies exploring MEMS for harsh environment sensors in aerospace

Thermal energy harvesting is predicted to become a global, billion-pound market by 2020. This book provides a current perspective of recent developments and trends within thermoelectric materials and devices for power energy harvesting applications. The book highlights the potential of thermoelectrics in the context of a low carbon energy economy, and features in-depth coverage of a range of different fabrication methods for thermoelectric materials including electrodeposition. Topics covered include layered and pseudo-layered materials, thermoelectric oxides, nano- and micro-fabrication techniques, high-throughput thermoelectric measurement techniques and power mining. This book is ideal for researchers and industrialists in materials science.

Vibration-based energy harvesting is one of the attractive solutions for powering autonomous microsystems, due to the fact that, vibration sources are ubiquitous in the ambient environment. Basically, the vibration-to-electricity conversion mechanism can be implemented by piezoelectric, electromagnetic, electrostatic, and magnetostrictive transductions. In this book, piezoelectric transduction is investigated due to its high electrical output density, compatibility with conventional thick-film and thin-film fabrication technologies and ease of integration in silicon integrated circuits. A three dimensional thick-film structure in the form of a free-standing cantilever incorporated with piezoelectric materials is proposed in this work. The advantages of this structure include minimising the movement constraints on the piezoelectric, thereby maximising the electrical output and offering the ability for integration with other microelectronic devices.