This book is written by the world leading experts in nanotechnology. It examines the manufacture of integrated circuits and opto-electronic devices and the systems required to achieve accuracy in the nanometre range. Nanotechnology is essential in the fabrication of extremely precise and fine parts. This technology is vital to the advances being made in various high-tech processes. This highly topical work will therefore be an essential source of reference for academic and industrial research and research workers particularly in high-technology and precision industries.