How Can We Lower the Power Consumption of Gas Sensors? There is a growing demand for low-power, high-density gas sensor arrays that can overcome problems relative to high power consumption. Low power consumption is a prerequisite for any type of sensor system to operate at optimum efficiency. Focused on fabrication-friendly microelectromechanical systems (MEMS) and other areas of sensor technology, MEMS and Nanotechnology for Gas Sensors explores the distinct advantages of using MEMS in low power consumption, and provides extensive coverage of the MEMS/nanotechnology platform for gas sensor applications. This book outlines the microfabrication technology needed to fabricate a gas sensor on a MEMS platform. It discusses semiconductors, graphene, nanocrystalline ZnO-based microfabricated sensors, and nanostructures for volatile organic compounds. It also includes performance parameters for the state of the art of sensors, and the applications of MEMS and nanotechnology in different areas relevant to the sensor domain. In addition, the book includes: An introduction to MEMS for MEMS materials, and a historical background of MEMS A concept for cleanroom technology The substrate materials used for MEMS Two types of deposition techniques, including chemical vapour deposition (CVD) The properties and types of photoresists, and the photolithographic processes Different micromachining techniques for the gas sensor platform, and bulk and surface micromachining The design issues of a microheater for MEMS-based sensors The synthesis technique of a nanocrystalline metal oxide layer A detailed review about graphene; its different deposition techniques; and its important electronic, electrical, and mechanical properties with its application as a gas sensor Low-cost, low-temperature synthesis techniques An explanation of volatile organic compound (VOC) detection and how relative humidity affects the sensing parameters MEMS and Nanotechnology for Gas Sensors provides a broad overview of current, emerging, and possible future MEMS applications. MEMS technology can be applied in the automotive, consumer, industrial, and biotechnology domains.

Nano particles have created a high interest in recent years by virtue of their unusual mechanical, electrical, optical and magnetic properties and find wide applications in all fields of engineering. This edited volume aims to present the latest trends and updates in nanogenerators, thin film solar cells and green synthesis of metallic nanoparticles with a focus on nanostructured semiconductor devices. Exclusive chapter on electrical transport of nanostructure explains device physics for material properties for reduced dimensions. Additionally, the text describes the functionality of metallic nanoparticles and their application in molecular imaging and optical metamaterials. Piezoelectric nanogenerators has been touched upon from the energy perspective as well. Key Features: * Organized contents on Nanogenerators, VOC sensing, nanoelectronics, and NEMS. * Discusses eco-friendly green synthesis methods for metallic nanoparticles. * Touches upon low power nano devices (e.g. nanogenerators) for energy harvesting with quantum mechanical study. * Thin film/heterojunction based high efficiency solar cell addressed aimed at reducing global energy consumption.

Nano particles have created a high interest in recent years by virtue of their unusual mechanical, electrical, optical and magnetic properties and find wide applications in all fields of engineering. This edited volume aims to present the latest trends and updates in nanogenerators, thin film solar cells and green synthesis of metallic nanoparticles with a focus on nanostructured semiconductor devices. Exclusive chapter on electrical transport of nanostructure explains device physics for material properties for reduced dimensions. Additionally, the text describes the functionality of metallic nanoparticles and their application in molecular imaging and optical metamaterials. Piezoelectric nanogenerators has been touched upon from the energy perspective as well. Key Features: * Organized contents on Nanogenerators, VOC sensing, nanoelectronics, and NEMS. * Discusses eco-friendly green synthesis methods for metallic nanoparticles. * Touches upon low power nano devices (e.g. nanogenerators) for energy harvesting with quantum mechanical study. * Thin film/heterojunction based high efficiency solar cell addressed aimed at reducing global energy consumption.

How Can We Lower the Power Consumption of Gas Sensors? There is a growing demand for low-power, high-density gas sensor arrays that can overcome problems relative to high power consumption. Low power consumption is a prerequisite for any type of sensor system to operate at optimum efficiency. Focused on fabrication-friendly microelectromechanical systems (MEMS) and other areas of sensor technology, MEMS and Nanotechnology for Gas Sensors explores the distinct advantages of using MEMS in low power consumption, and provides extensive coverage of the MEMS/nanotechnology platform for gas sensor applications. This book outlines the microfabrication technology needed to fabricate a gas sensor on a MEMS platform. It discusses semiconductors, graphene, nanocrystalline ZnO-based microfabricated sensors, and nanostructures for volatile organic compounds. It also includes performance parameters for the state of the art of sensors, and the applications of MEMS and nanotechnology in different areas relevant to the sensor domain. In addition, the book includes: An introduction to MEMS for MEMS materials, and a historical background of MEMS A concept for cleanroom technology The substrate materials used for MEMS Two types of deposition techniques, including chemical vapour deposition (CVD) The properties and types of photoresists, and the photolithographic processes Different micromachining techniques for the gas sensor platform, and bulk and surface micromachining The design issues of a microheater for MEMS-based sensors The synthesis technique of a nanocrystalline metal oxide layer A detailed review about graphene; its different deposition techniques; and its important electronic, electrical, and mechanical properties with its application as a gas sensor Low-cost, low-temperature synthesis techniques An explanation of volatile organic compound (VOC) detection and how relative humidity affects the sensing parameters MEMS and Nanotechnology for Gas Sensors provides a broad overview of current, emerging, and possible future MEMS applications. MEMS technology can be applied in the automotive, consumer, industrial, and biotechnology domains.