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High Power Impulse Magnetron Sputtering: Fundamentals,
Technologies, Challenges and Applications is an in-depth
introduction to HiPIMS that emphasizes how this novel sputtering
technique differs from conventional magnetron processes in terms of
both discharge physics and the resulting thin film characteristics.
Ionization of sputtered atoms is discussed in detail for various
target materials. In addition, the role of self-sputtering,
secondary electron emission and the importance of controlling the
process gas dynamics, both inert and reactive gases, are examined
in detail with an aim to generate stable HiPIMS processes. Lastly,
the book also looks at how to characterize the HiPIMS discharge,
including essential diagnostic equipment. Experimental results and
simulations based on industrially relevant material systems are
used to illustrate mechanisms controlling nucleation kinetics,
column formation and microstructure evolution.
This book introduces readers to the physics governing electron
emission under high voltages and temperatures, and highlights
recent modeling and numerical developments for describing these
phenomena. It begins with a brief introduction, presenting
several applications that have driven electron emission research in
the last few decades. The authors summarize the most relevant
theories including the physics of thermo-field electron emission
and the main characteristic parameters. Based on these theories,
they subsequently describe numerical multi-physics models and
discuss the main findings on the effect of space charges, emitter
geometry, pulse duration, etc. Beyond the well-known photoelectric
effect, the book reviews recent advanced theories on photon-metal
interaction. Distinct phenomena occur when picosecond and
femtosecond lasers are used to irradiate a surface. Their
consequences on metal electron dynamics and heating are presented
and discussed, leading to various emission regimes – in and out
of equilibrium. In closing, the book reviews the effects of
electron emission on high-voltage operation in vacuum, especially
breakdown and conditioning, as the most common examples. The
book offers a uniquely valuable resource for graduate and PhD
students whose work involves electron emission, high-voltage
holding, laser irradiation of surfaces, vacuum or discharge
breakdown, but also for academic researchers and professionals in
the field of accelerators and solid state physics with an interest
in this highly topical area.
This book introduces readers to the physics governing electron
emission under high voltages and temperatures, and highlights
recent modeling and numerical developments for describing these
phenomena. It begins with a brief introduction, presenting several
applications that have driven electron emission research in the
last few decades. The authors summarize the most relevant theories
including the physics of thermo-field electron emission and the
main characteristic parameters. Based on these theories, they
subsequently describe numerical multi-physics models and discuss
the main findings on the effect of space charges, emitter geometry,
pulse duration, etc. Beyond the well-known photoelectric effect,
the book reviews recent advanced theories on photon-metal
interaction. Distinct phenomena occur when picosecond and
femtosecond lasers are used to irradiate a surface. Their
consequences on metal electron dynamics and heating are presented
and discussed, leading to various emission regimes - in and out of
equilibrium. In closing, the book reviews the effects of electron
emission on high-voltage operation in vacuum, especially breakdown
and conditioning, as the most common examples. The book offers a
uniquely valuable resource for graduate and PhD students whose work
involves electron emission, high-voltage holding, laser irradiation
of surfaces, vacuum or discharge breakdown, but also for academic
researchers and professionals in the field of accelerators and
solid state physics with an interest in this highly topical area.
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