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This book systematically describes the design options for micro
systems as well as the equations needed for calculating the
behavior of their basic elements. The fundamental equations needed
to calculate the effects and forces that are important in micro
systems are also provided. Readers do not require previous
knowledge of fabrication processes. This second edition of
the volume is a thoroughly revised and extended update. The target
audience primarily comprises experts in the field of micro systems
and the book is also suitable for graduate engineering students.
For quick reference, equations are presented in tables that can be
found in an index at the end of the book.
This book systematically describes the design options for micro
systems as well as the equations needed for calculating the
behavior of their basic elements. The fundamental equations needed
to calculate the effects and forces that are important in micro
systems are also provided. Readers do not require previous
knowledge of fabrication processes. This second edition of the
volume is a thoroughly revised and extended update. The target
audience primarily comprises experts in the field of micro systems
and the book is also suitable for graduate engineering students.
For quick reference, equations are presented in tables that can be
found in an index at the end of the book.
The book describes the design of micro systems systematically as
well as the equations needed for an estimation of the basic
elements. It can be used without knowing fabrication processes of
micro systems and provides the basic equations needed to calculate
the effects and forces which are important in micro systems. For
quick reference equations are presented in tables which are found
in an index at the end of this book.
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