This book systematically describes the design options for micro
systems as well as the equations needed for calculating the
behavior of their basic elements. The fundamental equations needed
to calculate the effects and forces that are important in micro
systems are also provided. Readers do not require previous
knowledge of fabrication processes. This second edition of the
volume is a thoroughly revised and extended update. The target
audience primarily comprises experts in the field of micro systems
and the book is also suitable for graduate engineering students.
For quick reference, equations are presented in tables that can be
found in an index at the end of the book.
General
Is the information for this product incomplete, wrong or inappropriate?
Let us know about it.
Does this product have an incorrect or missing image?
Send us a new image.
Is this product missing categories?
Add more categories.
Review This Product
No reviews yet - be the first to create one!