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Books > Professional & Technical > Industrial chemistry & manufacturing technologies > Industrial chemistry > Chemical engineering
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Microwave Plasma Sources and Methods in Processing Technology (Hardcover)
Loot Price: R3,900
Discovery Miles 39 000
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Microwave Plasma Sources and Methods in Processing Technology (Hardcover)
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A practical introduction to microwave plasma for processing
applications at a variety of pressures In Microwave Plasma Sources
and Methods in Processing Technology, the authors deliver a
comprehensive introduction to microwaves and microwave-generated
plasmas. Ideal for anyone interested in non-thermal gas discharge
plasmas and their applications, the book includes detailed
descriptions, explanations, and practical guidance for the study
and use of microwave power, microwave components, plasma, and
plasma generation. This reference includes over 130 full-color
diagrams to illustrate the concepts discussed within. The
distinguished authors discuss the plasmas generated at different
levels of power, as well as their applications at reduced,
atmospheric and higher pressures. They also describe plasmas inside
liquids and plasma interactions with combustion flames. Microwave
Plasma Sources and Methods in Processing Technology concludes with
an incisive exploration of new trends in the study and application
of microwave discharges, offering promising new areas of study. The
book also includes: - A thorough introduction to the basic
principles of microwave techniques and power systems, including a
history of the technology, microwave generators, waveguides, and
wave propagation - A comprehensive exploration of the fundamentals
of the physics of gas discharge plasmas, including plasma
generation, Townsend coefficients, and the Paschen curve -
Practical discussions of the interaction between plasmas and solid
surfaces and gases, including PVD, PE CVD, oxidation, sputtering,
evaporation, dry etching, surface activation, and cleaning -
In-depth examinations of microwave plasma systems for plasma
processing at varied parameters Perfect for researchers and
engineers in the microwave community, as well as those who work
with plasma applications, Microwave Plasma Sources and Methods in
Processing Technology will also earn a place in the libraries of
graduate and PhD students studying engineering physics, microwave
engineering, and plasmas.
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