Exploring genomic functions requires accurate hysiological data
acquisition to reveal the connection between genomic structure and
medical symptoms. Most of these genetic experiments begin by
changing certain genomic sequences of laboratory mice and then
monitoring their physiological behavior. Physiological parameters
typically include blood pressure, EKG, EEG, heart rate, body
temperature, and body activity. In order to acquire accurate data
with minimum distortion, a miniaturized wireless sensor without
battery is highly desired. This work focuses on wireless activity
sensor development. A lateral-axis differential capacitive MEMS
accelerometer is designed and fabricated in MUMPs process. The
system has been characterized with an untethered laboratory mouse.
The received signal shows various acceleration waveforms
corresponding to different types of mouse activities. The MEMS
accelerometer and interface circuit can be potentially integrated
with other biological sensors to achieve a miniature implantable
biosensing system.
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