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Metal Impurities in Silicon- and Germanium-Based Technologies - Origin, Characterization, Control, and Device Impact (Paperback, Softcover reprint of the original 1st ed. 2018)
Loot Price: R5,305
Discovery Miles 53 050
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Metal Impurities in Silicon- and Germanium-Based Technologies - Origin, Characterization, Control, and Device Impact (Paperback, Softcover reprint of the original 1st ed. 2018)
Series: Springer Series in Materials Science, 270
Expected to ship within 10 - 15 working days
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This book provides a unique review of various aspects of metallic
contamination in Si and Ge-based semiconductors. It discusses all
of the important metals including their origin during crystal
and/or device manufacturing, their fundamental properties, their
characterization techniques and their impact on electrical devices'
performance. Several control and possible gettering approaches are
addressed. The book offers a valuable reference guide for all
researchers and engineers studying advanced and state-of-the-art
micro- and nano-electronic semiconductor devices and circuits.
Adopting an interdisciplinary approach, it combines perspectives
from e.g. material science, defect engineering, device processing,
defect and device characterization, and device physics and
engineering.
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