For Microelectromechanical Systems (MEMS) and Nanoelectromechanical
Systems (NEMS) production, each product requires a unique process
technology. This book provides a comprehensive insight into the
tools necessary for fabricating MEMS/NEMS and the process
technologies applied. Besides, it describes enabling technologies
which are necessary for a successful production, i.e., wafer
planarization and bonding, as well as contamination control.
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