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Books > Professional & Technical > Technology: general issues > Nanotechnology

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Micro and Nano Fabrication - Tools and Processes (Hardcover, 2015 ed.) Loot Price: R4,584
Discovery Miles 45 840
Repayment Terms: R430 pm x 12*
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Micro and Nano Fabrication - Tools and Processes (Hardcover, 2015 ed.): Hans H. Gatzen, Volker Saile, Jurg Leuthold

Micro and Nano Fabrication - Tools and Processes (Hardcover, 2015 ed.)

Hans H. Gatzen, Volker Saile, Jurg Leuthold

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Loot Price R4,584 Discovery Miles 45 840 | Repayment Terms: R430 pm x 12*

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For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

General

Imprint: Springer-Verlag
Country of origin: Germany
Release date: 2015
First published: 2015
Authors: Hans H. Gatzen • Volker Saile • Jurg Leuthold
Dimensions: 235 x 155 x 31mm (L x W x T)
Format: Hardcover
Pages: 519
Edition: 2015 ed.
ISBN-13: 978-3-662-44394-1
Categories: Books > Professional & Technical > Technology: general issues > Nanotechnology
Books > Professional & Technical > Mechanical engineering & materials > Engineering skills & trades > Tool making
Books > Professional & Technical > Mechanical engineering & materials > Engineering skills & trades > Welding
Books > Professional & Technical > Industrial chemistry & manufacturing technologies > Other manufacturing technologies > Precision instruments manufacture > General
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LSN: 3-662-44394-5
Barcode: 9783662443941

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