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Books > Professional & Technical > Technology: general issues > Nanotechnology

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Micro and Nano Fabrication - Tools and Processes (Hardcover, 2015 ed.) Loot Price: R4,674

Discovery Miles 46 740

Repayment Terms: R438 pm x 12*

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Micro and Nano Fabrication - Tools and Processes (Hardcover, 2015 ed.): Hans H. Gatzen, Volker Saile, Jurg Leuthold

Micro and Nano Fabrication - Tools and Processes (Hardcover, 2015 ed.)

Hans H. Gatzen, Volker Saile, Jurg Leuthold

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Loot Price R4,674 Discovery Miles 46 740 | Repayment Terms: R438 pm x 12*

Expected to ship within 12 - 17 working days

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For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

General

Imprint:	Springer-Verlag
Country of origin:	Germany
Release date:	2015
First published:	2015
Authors:	Hans H. Gatzen • Volker Saile • Jurg Leuthold
Dimensions:	235 x 155 x 31mm (L x W x T)
Format:	Hardcover
Pages:	519
Edition:	2015 ed.
ISBN-13:	978-3-662-44394-1
Categories:	Books > Professional & Technical > Technology: general issues > Nanotechnology Books > Professional & Technical > Mechanical engineering & materials > Engineering skills & trades > Tool making Books > Professional & Technical > Mechanical engineering & materials > Engineering skills & trades > Welding Books > Professional & Technical > Industrial chemistry & manufacturing technologies > Other manufacturing technologies > Precision instruments manufacture > General Promotions
LSN:	3-662-44394-5
Barcode:	9783662443941