Microelectromechanical sytems (MEMS) applications in RF and
microwave electronics are revolutionizing wireless communications.
This text provides a comprehensive explanation of the fabrication
and fundamental physics of MEMS and their applications in
electronic communication systems. The book integrates circuit
fabrication technology, device design-oriented materials,
mechanical and microwave considerations, and RF/microwave
electronics to give engineers and managers a clear understanding of
the potential and limitations of MEMS in electronic communications.
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