Enabling Technology for MEMS and Nanodevices - Advanced Micro and Nanosystems (Paperback)

This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. A close look at enabling technologies is taken, the first section on MEMS featuring an introduction to the challenges and benefi ts of three-dimensional silicon processing. An insider's view of industrial MEMS commercialization is followed by chapters on capacitive interfaces for MEMS, packaging issues of micro- and nanosystems, MEMS contributions to high frequency integrated resonators and filters, and the uses of MEMS in mass data storage and electrochemical imaging by means of scanning micro- and nanoprobes. The second section on nanodevices first tackles the emerging topic of nanofluidics with a contribution each on simulation tools and on devices and uses, followed by another two on nanosensors featuring CNT sensors and CMOS-based DNA sensor arrays, respectively.

General

Imprint:	Wiley-VCH Verlag GmbH
Country of origin:	Germany
Release date:	April 2013
Editors:	Henry Baltes • Oliver Brand • Gary K. Fedder • Christofer Hierold • Jan G. Korvink • Osamu Tabata
Dimensions:	238 x 167 x 20mm (L x W x T)
Format:	Paperback
Pages:	439
ISBN-13:	978-3-527-33498-8
Categories:	Books > Professional & Technical > Technology: general issues > Nanotechnology Books > Professional & Technical > Mechanical engineering & materials > Materials science > General
LSN:	3-527-33498-X
Barcode:	9783527334988

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