Micro-Optomechatronics systematically explains the devices based
upon the fusion of optics, electronics, and mechanics via MEMS
technology. The book first demonstrates how devices are classified
based upon the control methods of power and position of the laser
beam. It then describes the devices in detail according to the
classification of control methods. Positional control is classified
as intermittent control, constant velocity control, and follow-up
control. The volume concludes with an explanation of the optics and
dynamics which provide the theoretical background of control
methods, and an overview of the influence of nano-technology and
near field optical memory.
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