Silicon-on-Insulator Technology: Materials to VLSI, 2nd Edition
describes the different facets of SOI technology. SOI chips are now
commercially available and SOI wafer manufacturers have gone
public. SOI has finally made it out of the academic world and is
now a big concern for every major semiconductor company. SOI
technology has indeed deserved serious recognition:
high-temperature (400 DegreesC), extremely rad-hard (500 Mrad(Si)),
high-density (16 Mb, 0.9-volt DRAM), high-speed (several GHz) and
low-voltage (0.5 V) SOI circuits have been demonstrated. Strategic
choices in favor of the use of SOI for low-voltage, low-power
portable systems have been made by several major semiconductor
manufacturers. Silicon-on-Insulator Technology: Materials to VLSI,
2nd Edition presents a complete and state-of-the-art review of SOI
materials, devices and circuits. SOI fabrication and
characterization techniques, SOI device processing, the physics of
the SOI MOSFET as well as that of SOI other devices, and the
performances of SOI circuits are discussed in detail. The SOI
specialist will find this book invaluable as a source of compiled
references covering the different aspects of SOI technology. For
the non-specialist, the book serves as an excellent introduction to
the topic with detailed, yet simple and clear explanations.
Silicon-on-Insulator Technology: Materials to VLSI, 2nd Edition is
recommended for use as a textbook for classes on semiconductor
device processing and physics. The level of the book is appropriate
for teaching at both the undergraduate and graduate levels.
Silicon-on-Insulator Technology: Materials to VLSI, 2nd Edition
includes the new materials, devices, and circuit concepts which
have been devised since the publication of the first edition. The
circuit sections, in particular, have been updated to present the
performances of SOI devices for low-voltage, low-power
applications, as well as for high-temperature, smart-power, and
DRAM applications. The other sections, such as those describing SOI
materials, the physics of the SOI MOSFET and other devices have
been updated to present the state of the art in SOI technology.
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