Chemical Vapor Deposition Polymerization - The Growth and
Properties of Parylene Thin Films is intended to be valuable to
both users and researchers of parylene thin films. It should be
particularly useful for those setting up and characterizing their
first research deposition system. It provides a good picture of the
deposition process and equipment, as well as information on
system-to-system variations that is important to consider when
designing a deposition system or making modifications to an
existing one. Also included are methods to characterizae a
deposition system's pumping properties as well as monitor the
deposition process via mass spectrometry. There are many references
that will lead the reader to further information on the topic being
discussed.
This text should serve as a useful reference source and handbook
for scientists and engineers interested in depositing high quality
parylene thin films.
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