Mechanical Properties of Silicon Based Compounds: Silicides (Paperback, 1st ed. 2019)

This book focuses on the mechanical properties of silicides for very large scale integration (VLSI) applications. It presents the fabrication process for bulk silicides and thin films, and list complete testing deformation for a variety of silicon based compounds. The author also presents dislocation in silicides, fatigue and fracture aspects. A special chapter is given on deformation in silicides in the nano scale. Composites and alloys are also considered.

General

Imprint:	Springer Nature Switzerland AG
Country of origin:	Switzerland
Series:	Engineering Materials
Release date:	August 2020
First published:	2019
Authors:	Joshua Pelleg
Dimensions:	235 x 155mm (L x W)
Format:	Paperback
Pages:	274
Edition:	1st ed. 2019
ISBN-13:	978-3-03-022600-8
Categories:	Books > Professional & Technical > Mechanical engineering & materials > Materials science > Testing of materials > General
LSN:	3-03-022600-X
Barcode:	9783030226008

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