This volume contains the proceedings of the 1998 International
Conference on Simulation of Semiconductor Processes and Devices and
provides an open forum for the presentation of the latest results
and trends in modeling and simulation of semiconductor equipment,
processes and devices. Topics include: * semiconductor equipment
simulation * process modeling and simulation * device modeling and
simulation of complex structures * interconnect modeling *
integrated systems for process, device, circuit simulation and
optimisation * numerical methods and algorithms * compact modeling
and parameter extraction * modeling for RF applications *
simulation and modeling of new devices (heterojunction based,
SET's, quantum effect devices, laser based ...)
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