The first textbook on micron-scale mobile robotics, introducing the
fundamentals of design, analysis, fabrication, and control, and
drawing on case studies of existing approaches. Progress in micro-
and nano-scale science and technology has created a demand for new
microsystems for high-impact applications in healthcare,
biotechnology, manufacturing, and mobile sensor networks. The new
robotics field of microrobotics has emerged to extend our
interactions and explorations to sub-millimeter scales. This is the
first textbook on micron-scale mobile robotics, introducing the
fundamentals of design, analysis, fabrication, and control, and
drawing on case studies of existing approaches. The book covers the
scaling laws that can be used to determine the dominant forces and
effects at the micron scale; models forces acting on microrobots,
including surface forces, friction, and viscous drag; and describes
such possible microfabrication techniques as photo-lithography,
bulk micromachining, and deep reactive ion etching. It presents
on-board and remote sensing methods, noting that remote sensors are
currently more feasible; studies possible on-board microactuators;
discusses self-propulsion methods that use self-generated local
gradients and fields or biological cells in liquid environments;
and describes remote microrobot actuation methods for use in
limited spaces such as inside the human body. It covers possible
on-board powering methods, indispensable in future medical and
other applications; locomotion methods for robots on surfaces, in
liquids, in air, and on fluid-air interfaces; and the challenges of
microrobot localization and control, in particular multi-robot
control methods for magnetic microrobots. Finally, the book
addresses current and future applications, including noninvasive
medical diagnosis and treatment, environmental remediation, and
scientific tools.
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