Electron and Ion Optics (Paperback, Softcover reprint of the original 1st ed. 1988)

The field of electron and ion optics is based on the analogy between geometrical light optics and the motion of charged particles in electromagnetic fields. The spectacular development of the electron microscope clearly shows the possibilities of image formation by charged particles of wavelength much shorter than that of visible light. As new applications such as particle accelerators, cathode ray tubes, mass and energy spectrometers, microwave tubes, scanning-type analytical instruments, heavy beam technologies, etc. emerged, the scope of particle beam optics has been exten ded to the formation of fine probes. The goal is to concentrate as many particles as possible in as small a volume as possible. Fabrication of microcircuits is a good example of the growing importance of this field. The current trend is towards increased circuit complexity and pattern density. Because of the diffraction limitation of processes using optical photons and the technological difficulties connected with x-ray processes, charged particle beams are becoming popular. With them it is possible to write directly on a wafer under computer control, without using a mask. Focused ion beams offer especially great possibilities in the submicron region. Therefore, electron and ion beam technologies will most probably playa very important role in the next twenty years or so."

General

Imprint:	Springer-Verlag New York
Country of origin:	United States
Series:	Microdevices
Release date:	October 2011
First published:	1988
Authors:	Miklos Szilagyi
Dimensions:	244 x 170 x 29mm (L x W x T)
Format:	Paperback
Pages:	556
Edition:	Softcover reprint of the original 1st ed. 1988
ISBN-13:	978-1-4612-8247-1
Categories:	Books > Professional & Technical > Energy technology & engineering > Electrical engineering > General Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > Electronic devices & materials > General Promotions
LSN:	1-4612-8247-0
Barcode:	9781461282471

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