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MEMS: Field Models and Optimal Design (Paperback, 1st ed. 2020)
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MEMS: Field Models and Optimal Design (Paperback, 1st ed. 2020)
Series: Lecture Notes in Electrical Engineering, 573
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This book highlights numerical models as powerful tools for the
optimal design of Micro-Electro-Mechanical Systems (MEMS). Most
MEMS experts have a background in electronics, where circuit models
or behavioral models (i.e. lumped-parameter models) of devices are
preferred to field models. This is certainly convenient in terms of
preliminary design, e.g. in the prototyping stage. However, design
optimization should also take into account fine-sizing effects on
device behavior and therefore be based on distributed-parameter
models, such as finite-element models. The book shows how the
combination of automated optimal design and field-based models can
produce powerful design toolboxes for MEMS. It especially focuses
on illustrating theoretical concepts with practical examples,
fostering comprehension through a problem-solving approach. By
comparing the results obtained using different methods, readers
will learn to identify their respective strengths and weaknesses.
In addition, special emphasis is given to evolutionary computing
and nature-inspired optimization strategies, the effectiveness of
which has already been amply demonstrated. Given its scope, the
book provides PhD students, researchers and professionals in the
area of computer-aided analysis with a comprehensive, yet concise
and practice-oriented guide to MEMS design and optimization. To
benefit most from the book, readers should have a basic grasp of
electromagnetism, vector analysis and numerical methods.
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