Developments in Surface Contamination and Cleaning, Volume 7 - Cleanliness Validation and Verification (Hardcover)

Volume 7 & 8

The device sizes in the semiconductor industries are shrinking, devices become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not effective at smaller scales. New cleaning techniques will have to be considered and employed for contaminant removal. Similarly, new cleaning techniques for molecular contaminants will also have to be deployed.

The book series "Developments in Surface Contamination and Cleaning" as a whole will provide an excellent source of information on these alternative cleaning techniques as well as methods for characterization and validation of surface contamination. Each volume has a particular topical focus, covering the key techniques and recent developments in the area.

Volume 7: Contamination Sources, Measurement, Validation, and Regulatory Aspects

The chapters in this Volume addressthesources of surface contaminants and various methods for theircollection and characterization, as well as methods for cleanliness validation. Regulatory aspects of cleaning are also covered. The collection of topics in this book is unique and complements other volumes in this series.

Volume 7 & 8

Edited by the leading experts in small-scale particle surface contamination, cleaning and cleaning control this book will be an invaluable reference for researchers and engineers in R&D, manufacturing, quality control and procurement specification situated in a multitude of industries such as: aerospace, automotive, biomedical, defense, energy, manufacturing, microelectronics, optics and xerography. Researchers in an academic setting will also find these volumes excellent source books.
This Volume complements other volumes in this series and:
provides a state-of-the-art survey and best-practice guidance for scientists and engineers engaged in surface cleaning or handling the consequences of surface contamination
addresses the continuing trends of shrinking device size and contamination vulnerability in a range of industries, spearheaded by the semiconductor industry and other
Volume 7]
includes new regulatory aspects"

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