Microsystem Technology and Microrobotics (Hardcover, 1997 ed.)

Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.

General

Imprint:	Springer-Verlag
Country of origin:	Germany
Release date:	March 1997
First published:	1997
Authors:	Sergej Fatikow • Ulrich Rembold
Dimensions:	234 x 156 x 23mm (L x W x T)
Format:	Hardcover
Pages:	408
Edition:	1997 ed.
ISBN-13:	978-3-540-60658-1
Categories:	Books > Computing & IT > Computer hardware & operating systems > Computer architecture & logic design > General Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > Automatic control engineering > Robotics
LSN:	3-540-60658-0
Barcode:	9783540606581

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