Micro Mechanical Systems, Volume 6 - Principles and Technology (Hardcover)

In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four discusses tribological aspects of microsystems. Section five covers fabrication, performance and examples of silicon microsensors. Section six looks at electric and magnetic micro-actuators for micro-robots. Section seven covers energy source and power supply methods. Section eight covers controlling principles and methods of micro mechanical systems and section nine gives examples of microsystems and micromachines. The final section discusses the future problems and outlook of micro mechanical systems.

General

Imprint:	Elsevier Science Ltd
Country of origin:	United Kingdom
Series:	Handbook of Sensors and Actuators
Release date:	July 1998
First published:	August 1998
Editors:	T. Fukuda • Wolfgang Menz
Dimensions:	229 x 178 x 19mm (L x W x T)
Format:	Hardcover
Pages:	276
ISBN-13:	978-0-444-82363-2
Categories:	Books > Professional & Technical > Mechanical engineering & materials > Mechanical engineering > General Books > Professional & Technical > Mechanical engineering & materials > Materials science > General
LSN:	0-444-82363-8
Barcode:	9780444823632

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