From materials science to integrated circuit development, much of
modern technology is moving from the microscale toward the
nanoscale. This book focuses on the fundamental physics underlying
innovative techniques for analyzing surfaces and near-surfaces. New
analytical techniques have emerged to meet these technological
requirements, all based on a few processes that govern the
interactions of particles and radiation with matter. This book
addresses the fundamentals and application of these processes, from
thin films to field effect transistors.
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