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Optical Inspection of Microsystems, Second Edition (Hardcover, 2nd edition)
Loot Price: R6,637
Discovery Miles 66 370
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Optical Inspection of Microsystems, Second Edition (Hardcover, 2nd edition)
Expected to ship within 12 - 17 working days
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Where conventional testing and inspection techniques fail at the
microscale, optical techniques provide a fast, robust, noninvasive,
and relatively inexpensive alternative for investigating the
properties and quality of microsystems. Speed, reliability, and
cost are critical factors in the continued scale-up of microsystems
technology across many industries, and optical techniques are in a
unique position to satisfy modern commercial and industrial
demands. Optical Inspection of Microsystems, Second Edition,
extends and updates the first comprehensive survey of the most
important optical measurement techniques to be successfully used
for the inspection of microsystems. Under the guidance of
accomplished researcher Wolfgang Osten, expert contributors from
industrial and academic institutions around the world share their
expertise and experience with techniques such as image processing,
image correlation, light scattering, scanning probe microscopy,
confocal microscopy, fringe projection, grid and moire techniques,
interference microscopy, laser-Doppler vibrometry, digital
holography, speckle metrology, spectroscopy, and sensor fusion
technologies. They also examine modern approaches to data
acquisition and processing, such as the determination of surface
features and the estimation of uncertainty of measurement results.
The book emphasizes the evaluation of various system properties and
considers encapsulated components to increase quality and
reliability. Numerous practical examples and illustrations of
optical testing reinforce the concepts. Supplying effective tools
for increased quality and reliability, this book Provides a
comprehensive, up-to-date overview of optical techniques for the
measurement and inspection of microsystems Discusses image
correlation, displacement and strain measurement, electro-optic
holography, and speckle metrology techniques Offers numerous
practical examples and illustrations Includes calibration of
optical measurement systems for the inspection of MEMS Presents the
characterization of dynamics of MEMS
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