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Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting (Hardcover, 1st ed. 2016)
Loot Price: R2,189
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Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting (Hardcover, 1st ed. 2016)
Series: Springer Theses
Expected to ship within 10 - 15 working days
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This book presents a universal mass-production micro/nano
integrated fabrication technology, which can be used to realize
micro/nano hierarchical structures on Si-based materials and
flexible polymeric materials. This fabrication technology has been
systematically investigated by using experimental measurements,
mechanism analyses, theoretical simulations and so on. Three common
materials (i.e., silicon, PDMS and Parylene-C) with micro/nano
hierarchical structures have been successfully fabricated, which
also show several attractive properties. Furthermore, this book
introduces this fabrication technology into microenergy field, and
proposes several high-performance nanogenerators, of which
practical applications have also been studied in commercial
electronic device and biomedical microsystem.
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