Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting (Hardcover, 1st ed. 2016)

This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem.

General

Imprint:	Springer-Verlag
Country of origin:	Germany
Series:	Springer Theses
Release date:	December 2015
First published:	2016
Authors:	Xiao-Sheng Zhang
Dimensions:	235 x 155 x 10mm (L x W x T)
Format:	Hardcover
Pages:	122
Edition:	1st ed. 2016
ISBN-13:	978-3-662-48814-0
Categories:	Books > Professional & Technical > Technology: general issues > Nanotechnology Books > Professional & Technical > Industrial chemistry & manufacturing technologies > Industrial chemistry > Chemical engineering Books > Professional & Technical > Energy technology & engineering > Electrical engineering > Power generation & distribution Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > General Books > Professional & Technical > Industrial chemistry & manufacturing technologies > Other manufacturing technologies > Precision instruments manufacture > General
LSN:	3-662-48814-0
Barcode:	9783662488140

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