This book deals with the subject of secondary energy spectroscopy in the scanning electron microscope (SEM). The SEM is a widely used research instrument for scientific and engineering research and its low energy scattered electrons, known as secondary electrons, are used mainly for the purpose of nanoscale topographic imaging. This book demonstrates the advantages of carrying out precision electron energy spectroscopy of its secondary electrons, in addition to them being used for imaging. The book will demonstrate how secondary electron energy spectroscopy can transform the SEM into a powerful analytical tool that can map valuable material science information to the nanoscale, superimposing it onto the instrument's normal topographic mode imaging. The book demonstrates how the SEM can then be used to quantify/identify materials, acquire bulk density of states information, capture dopant density distributions in semiconductor specimens, and map surface charge distributions.

This book contains proposals to redesign the scanning electron microscope, so that it is more compatible with other charged particle beam instrumentation and analytical techniques commonly used in surface science research. It emphasizes the concepts underlying spectrometer designs in the scanning electron microscope, and spectrometers are discussed under one common framework so that their relative strengths and weaknesses can be more readily appreciated. This is done, for the most part, through simulations and derivations carried out by the author himself.

The book is aimed at scientists, engineers and graduate students whose research area or study in some way involves the scanning electron microscope and/or charged particle spectrometers. It can be used both as an introduction to these subjects and as a guide to more advanced topics about scanning electron microscope redesign.

This multidisciplinary book is intended to serve as a reference for postgraduate students and researchers working in the fields of charged particle optics or other finite-element-related applications. It is also suitable for use as a graduate text. For the non-specialist in charged particle optics, the opening chapters provide an introduction to the kinds of field problems that occur in charged particle beam systems. A new and comprehensive approach to the subject is taken. The finite element method is placed within a wider framework than strictly charged particle optics. Concepts developed in fluid flow and structural analysis, not hitherto used in charged particle optics, are presented. Benchmark test results provide a way of comparing the finite element method to other field-solving methods. The book also reports on some high-order interpolation techniques and mesh generation methods that will be of interest to other finite element researchers.Additional coverage includes: * field theory and field solutions for charged particle optics; * aspects of the finite difference method related to the finite element method; * finite element theory and procedure, including detailed formulation of local and global matrices; * higher-order elements, which can be an effective way of improving finite element accuracy; * the finite element method in three dimensions; * ways to formulate scalar and vector problems for magnetic fields; and * significant reduction of truncation errors using higher-order elements and extrapolation methods.

This multidisciplinary book is intended to serve as a reference for postgraduate students and researchers working in the fields of charged particle optics or other finite-element-related applications. It is also suitable for use as a graduate text. For the non-specialist in charged particle optics, the opening chapters provide an introduction to the kinds of field problems that occur in charged particle beam systems. A new and comprehensive approach to the subject is taken. The finite element method is placed within a wider framework than strictly charged particle optics. Concepts developed in fluid flow and structural analysis, not hitherto used in charged particle optics, are presented. Benchmark test results provide a way of comparing the finite element method to other field-solving methods. The book also reports on some high-order interpolation techniques and mesh generation methods that will be of interest to other finite element researchers. Additional coverage includes: field theory and field solutions for charged particle optics; aspects of the finite difference method related to the finite element method; finite element theory and procedure, including detailed formulation of local and global matrices; higher-order elements, which can be an effective way of improving finite element accuracy; the finite element method in three dimensions; ways to formulate scalar and vector problems for magnetic fields; and significant reduction of truncation errors using higher-order elements and extrapolation methods.