This book deals with the subject of secondary energy spectroscopy
in the scanning electron microscope (SEM). The SEM is a widely used
research instrument for scientific and engineering research and its
low energy scattered electrons, known as secondary electrons, are
used mainly for the purpose of nanoscale topographic imaging. This
book demonstrates the advantages of carrying out precision electron
energy spectroscopy of its secondary electrons, in addition to them
being used for imaging. The book will demonstrate how secondary
electron energy spectroscopy can transform the SEM into a powerful
analytical tool that can map valuable material science information
to the nanoscale, superimposing it onto the instrument's normal
topographic mode imaging. The book demonstrates how the SEM can
then be used to quantify/identify materials, acquire bulk density
of states information, capture dopant density distributions in
semiconductor specimens, and map surface charge distributions.
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