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Technologien der Mikrosysteme (German, Paperback, 1. Aufl. 2022): Ha Duong Ngo Technologien der Mikrosysteme (German, Paperback, 1. Aufl. 2022)
Ha Duong Ngo
R952 Discovery Miles 9 520
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Das Buch vermittelt die Grundlagen zur Herstellung und dem Aufbau von Mikrosystemen. Es kann in zwei Teile aufgeteilt werden. Der Schwerpunkt von Teil I liegt hierbei auf den Mikrofertigungsprozessen und behandelt die Siliziumtechnologie, mikromechanische Strukturierungs- (anisotropes AEtzen, DRIE) und Bondprozesse (Eutectic Bonding, Fusion Bonding). Teil II behandelt die Aufbau- und Verbindungstechnik fur Mikrosysteme und vermittelt Kenntnisse zu den Prinzipien der Chipmontage. Dabei stehen u.a. die Beschichtungstechnologien (Metallisierungssysteme) und Kontaktiertechnologien (Loeten, Kleben, Bonden) im Vordergrund.

MEMS Accelerometers (Paperback): Mahmoud Rasras, Ibrahim (Abe) M Elfadel, Ha Duong Ngo MEMS Accelerometers (Paperback)
Mahmoud Rasras, Ibrahim (Abe) M Elfadel, Ha Duong Ngo
R1,692 R1,404 Discovery Miles 14 040 Save R288 (17%)
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